SM MODEL DESCRIPTION
SM STANDARDS contain two calibration targets and are designed for use at high magnification where objects to be measured are 0.4 to 15 micrometers in size.
TARGET I contains Lines and Spaces ranging from 1 to 10 micrometers wide in 0.5 and 1.0 micrometer increments, with Pitch dimensions ranging from 2 to 20 micrometers in 1 and 2 micrometer increments.
TARGET II contains Lines and Spaces ranging from 0.5 to 1.6 micrometers wide in 0.1 and 0.2 micrometer increments.
SUBSTRATE SIZES available are 2-1/2 square x 0.06 thick chrome-on-quartz, 5 square x 0.09 thick chrome-on-quartz and 4 diameter x 1mm thick chrome-on-quartz wafer. Six inch plates are available by special order.
CALIBRATION REPORTS, which are lighting-condition specific, are supplied with each Standard and contain the measured values of each calibration location, certified traceable to N.I.S.T.
STANDARDS are supplied in a plastic working container and foam-lined hardwood storage box.(View).
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